23146465

9780892524839

X-Ray Lithography and Applications of Soft X-Rays to Technology : October 19-20, 1983, Upton, New York

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  • ISBN-13: 9780892524839
  • ISBN: 0892524839
  • Publication Date: 1983
  • Publisher: SPIE

AUTHOR

Wilson, Alan D., Brookhaven National Laboratory, National Synchrotron Light Source Staff, Society of Photo-Optical Instrumentation Engineers Staff

SUMMARY

Wilson, Alan D. is the author of 'X-Ray Lithography and Applications of Soft X-Rays to Technology : October 19-20, 1983, Upton, New York', published 1983 under ISBN 9780892524839 and ISBN 0892524839.

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