5322707
9780521029971
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This detailed, comprehensive text describes the fundamental properties of soft x-rays and extreme ultraviolet radiation and discusses their applications in a wide variety of fields, including EUV lithography and semiconductor chip manufacture.Attwood, David is the author of 'Soft X-rays And Extreme Ultraviolet Radiation Principles And Applications', published 2007 under ISBN 9780521029971 and ISBN 052102997X.
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