Sensor Technology 2001 Proceedings of the Sensor Technology Conference 2001, Enschede, the Netherlands 14-15 2001

The interest in sensors, especially microsensors, dramatically increased during the last decade of the 20th century. This is due to decreasing prices of microsensors, increasingly more reliable fabrication technology, and wide experience in the design of microsensors. However, the possibilities for new sensor concepts are hardly explored, so the field is also expanding scientifically. We also observe that the applications of sensors is spreading into new fields and incorporation of sensors in complete microsystems has begun to take shape. These proceedings report the newest results of research in sensor technology in The Netherlands and Belgium. They comprise design issues, sensor concepts, fabrication technology, systems aspects and packaging. Special aspects are the discussions of sensors for microfluidic systems as well as sensors for optical systems, integrated optics, and for optical telecommunication. Audience: This book will be of interest to engineers active in the field of sensors, sensor systems, microsystems, and M(O)EMS.Elwenspoek, Miko is the author of 'Sensor Technology 2001 Proceedings of the Sensor Technology Conference 2001, Enschede, the Netherlands 14-15 2001' with ISBN 9780792370123 and ISBN 0792370120.