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9780387245201

Mems/nems Handbook techniques and Applications

Mems/nems Handbook techniques and Applications
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  • ISBN-13: 9780387245201
  • ISBN: 0387245200
  • Publication Date: 2006
  • Publisher: Springer

AUTHOR

Leondes, Cornelius T.

SUMMARY

Covers all major topics within this increasingly important subject, including design methods, fabrication techniques, manufacturing methods, sensors & actuators.Leondes, Cornelius T. is the author of 'Mems/nems Handbook techniques and Applications', published 2006 under ISBN 9780387245201 and ISBN 0387245200.

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