22937111
9780819463562
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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.Behringer, Uwe F. W. is the author of 'EMLC 2006 : 22nd European Mask and Lithography Conference: 23-26 January 2006, Dresden, Germany', published 2006 under ISBN 9780819463562 and ISBN 0819463566.
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