329957
9780471869603
Importance of Plasma Applications to Integrated Circuit Processes. Physics of Plasma Chemical Reactions (Theory and Measurement). Plasma Apparatus. Application to Semiconductor Circuit Fabrication. Evaluation of Plasma Processes. References. Index.Sugano, Takuo is the author of 'Applications of Plasma Processes to Vlsi Technology' with ISBN 9780471869603 and ISBN 0471869600.
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